Electrostrictive actuators

Details Electrostrictive actuators Electrostrictive actuators

1988-09-09

1990-06-26

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

H01L 4108

Patent

active

049374893

ABSTRACT:
An electrostrictive actuator which comprises one or more electrostrictive elements and a rigid supporting member which may be formed of a metal plate for accommodating and supporting said electrostrictive elements, the supporting member being intended for amplification of an initial displacement of the electrostrictive elements caused by applying a voltage thereto. The actuator may be conveniently used for controlling fine angular adjustments of specimens and IC chips under microscopic scrutiny.

REFERENCES:
patent: 4435666 (1984-03-01), Fukui et al.
patent: 4570095 (1986-02-01), Uchikawa
patent: 4633118 (1986-12-01), Kosugi
patent: 4647808 (1987-03-01), Shibuya
patent: 4703215 (1987-10-01), Asano
patent: 4706230 (1987-11-01), Inoue et al.
patent: 4783610 (1988-11-01), Asano

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