Electrostrictive actuated mirror array and method for the manufa

Details Electrostrictive actuated mirror array and method for the manufa Electrostrictive actuated mirror array and method for the manufa

1997-01-22

1999-01-19

Wells, Kenneth B.

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

359224, 359291, 359855, 310328, 310366, G02B 508

Patent

active

058620028

ABSTRACT:
An array of M.times.N electrostrictive actuated mirrors for use in an optical projection system is prepared by using a relatively thick (100-150 .mu.m) electrostrictive ceramic wafer whose mechanical properties remain intact, which in turn facilitates the manufacturing process, comprising the steps of: (a) preparing a ceramic wafer made of an electrostrictive material, having top and bottom surfaces; (b) providing on the top surface of the ceramic wafer M vertically oriented first trenches; (c) filling the M trenches with an electrically conductive material; (d) providing N-1 horizontally oriented grooves; (e) covering the top surface, including the N-1 grooves thereon, with a layer of a dielectric material; (f) mounting the ceramic wafer on an active matrix; (g) providing a metallic layer on the bottom surface of the ceramic wafer; (h) forming a photoresistive layer on top of the metallic layer; (i) forming on the ceramic wafer N-1 horizontally oriented cuts, thereby forming an array of M.times.N actuating members; (j) forming on the ceramic wafer M vertically oriented second trenches; (h) removing the photoresistive layer; (l) placing an array of M.times.N hinges; (m) forming a mirror on each of the M.times.N hinges; and (n) making electrical connections to thereby form an array of M.times.N electrostrictive actuated mirrors.

REFERENCES:
patent: 5083857 (1992-01-01), Hornbeck
patent: 5212582 (1993-05-01), Nelson
patent: 5392151 (1995-02-01), Nelson
patent: 5434697 (1995-07-01), Ameer
patent: 5469302 (1995-11-01), Lim
patent: 5506720 (1996-04-01), Yoon

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