Electrostatically operated micromechanical capacitor

Details Electrostatically operated micromechanical capacitor Electrostatically operated micromechanical capacitor

1995-08-21

1997-12-09

Picard, Leo P.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

3613061, 3613063, 361290, H01G 506

Patent

active

056966628

ABSTRACT:
An electrostatically controlled, micromachined micromechanical capacitor having an adjustable, extensive tuning range. A configuration consists of a set of various sized beams or plates adjacent to a common plate or plates. The pairs of plates are linearly moved relative to each other to provide an adjustable capacitance. The movement of the plates is caused electrostatically by an application of a DC or low frequency voltage to the respective plates. The signals that are processed by these micromechanical capacitors are typically in the megahertz range and higher. The process for micromachining the micromechanical capacitor is similar to the process utilized in integrated circuit fabrication.

REFERENCES:
patent: 5003428 (1991-03-01), Shepherd
patent: 5399415 (1995-03-01), Chen et al.

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