Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2006-02-07
2006-02-07
Kianni, Kaveh (Department: 2883)
Optical waveguides
With optical coupler
Switch
C385S025000, C385S050000
Reexamination Certificate
active
06996306
ABSTRACT:
Electrostatically operated micro-optical devices and method of manufacturing such devices is disclosed. In a preferred embodiment, the micro-optical devices using electrostatic comb drive actuators having new spring designs to overcome side instability and exhibit enlarged displacement, having new designs of comb finger electrode shapes to generate larger force output, and having new clip type latch mechanism to control the corresponding device at certain states in an analog manner without electrical power consumption. Based on the proposed optical path and device configurations, integration and assembly of a plurality of reflective micro-mirrors in conjunction with proposed new comb drive actuators is very promising way to provide micro-optical devices to get good optical performance and suitable for multi-channel applications. We also disclose several process techniques to manufacture the micro-optical devices with said electrostatic comb drive actuator in a mass production manner with higher yield.
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Chen Chih-Chung
Chen Wen-Chih
Lai Yen-Jyh
Lee Chengkuo
Tsai Ming-Hung
Asia Pacific Microsystems, Inc.
Kianni Kaveh
Troxell Law Office PLLC
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