Electrostatically force balanced silicon accelerometer

Details Electrostatically force balanced silicon accelerometer Electrostatically force balanced silicon accelerometer

1995-12-08

1998-12-15

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351421, G01P 1513

Patent

active

058500421

ABSTRACT:
An accelerometer is fabricated by forming a proofmass and at least one associated hinge in a silicon substrate by ion implantation and the formation of an oxide support layer below the proofmass, subsequently integrally bonding two complementary proofmass and substrate structures together, and then removing the oxide support layer to leave the proofmass supported by the hinge within the body of silicon material. The proofmass may be electrically connected to a lead extending through an etched recess in one of the substrates; and the proofmass may be electrically isolated or separated from the substrates by an oxide layer and by a change in conductivity type of the semiconductor material where the hinge is structurally mounted to the substrates.

REFERENCES:
patent: 4679434 (1987-07-01), Stewart
patent: 4825335 (1989-04-01), Wilner
patent: 4851080 (1989-07-01), Howe et al.
patent: 5008774 (1991-04-01), Bullus
patent: 5116457 (1992-05-01), Jerman
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5473945 (1995-12-01), Grieff
patent: 5635739 (1997-06-01), Grieff

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