Electrostatically driven lithography

Details Electrostatically driven lithography Electrostatically driven lithography

2006-09-05

2006-09-05

Nguyen, Thinh (Department: 2861)

Recorders

Markers and/or driving means therefor

With ink supply to marker

Reexamination Certificate

active

07102656

ABSTRACT:
A method of nanolithography includes transporting a patterning compound from a nanoscopic tip to a substrate to form a pattern on the substrate. The patterning compound has a first electrostatic charge and the substrate has a second electrostatic charge which is opposite to the first electrostatic charge. The patterning compound can be an electrically conductive polymer having a charged polymer backbone. The patterns can be dots and lines having lateral dimensions of less than one micron. No electrical bias from an external voltage source between the tip and the substrate is needed.

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