Electrostatically driven dual vibrating beam force transducer

Details Electrostatically driven dual vibrating beam force transducer Electrostatically driven dual vibrating beam force transducer

1989-02-27

1990-02-20

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

73517AV, 73DIG1, G01L 110

Patent

active

049015869

ABSTRACT:
A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body having first and second generally parallel beams, coupled together at their ends. First and second electrodes are positioned adjacent to but not in contact with the respective beams. A drive circuit causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.

REFERENCES:
patent: 3505866 (1970-04-01), Welsbord et al.
patent: 3745384 (1973-07-01), Blanchard
patent: 4215570 (1980-08-01), EerNisse
patent: 4299122 (1981-11-01), Ueda et al.
patent: 4372173 (1983-02-01), EerNisse et al.
patent: 4467651 (1984-08-01), Peters et al.

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