Fluid handling – Flow affected by fluid contact – energy field or coanda effect – Means to regulate or vary operation of device
Patent
1978-09-21
1980-05-13
Munson, Gene M.
Fluid handling
Flow affected by fluid contact, energy field or coanda effect
Means to regulate or vary operation of device
357 4, 357 26, 357 55, 73 77, 137831, H01L 2904, H01L 2906, H01L 2984, H01L 2712
Patent
active
042031281
ABSTRACT:
The invention relates to thin silicon membranes formed in layers of silicon such as are normally utilized as substrates in the manufacture of integrated electronic circuits. The thin membranes constructed in accordance with the invention are capable of deformation by electrostatic forces and are applicable to a wide range of uses including the manufacture of solid state pressure sensors, resonant, and antenna structures, as well as electro-optical display elements. A processing technique is disclosed which is particularly adapted to forming membranes in silicon substrates in a manner which is compatible with the construction thereon of other integrated circuit components.
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Guckel Henry
Larsen Steven T.
Munson Gene M.
Wisconsin Alumni Research Foundation
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