Electrostatically deformable single crystal dielectrically coate

Details Electrostatically deformable single crystal dielectrically coate Electrostatically deformable single crystal dielectrically coate

1989-09-07

1991-06-11

Arnold, Bruce Y.

350607, 357 60, G02B 510, H01L 2904

Patent

active

050227459

ABSTRACT:
An electrostatically deformable single crystal mirror comprising a highly conducting thick substrate layer and a highly conducting thin membrane layer separated from the thick layer by an insulator is disclosed. The center of the insulating layer is etched to form a cavity. The outer surface of the membrane layer is polished and coated with a dielectric to form a mirror. A voltage is applied between the membrane and the substrate to cause the membrane to deform. Various embodiments of the invention provide for planar translation of the mirror and for convex/concave deformation of the mirror. Incorporation of a deformation sensor in the deformable mirror allows for deformation measurement. In a particular embodiment of the invention, the deformable mirror is used in a tunable etalon for use in an optical filter.

REFERENCES:
patent: 4203128 (1980-05-01), Guckel et al.
patent: 4680767 (1987-07-01), Hakimi et al.
Chau et al., Scaling Limits in Batch-Fabricated Silicon Pressure Sensors, IEEE Transactions on Electron Devices, vol. Ed-34, No. 4, Apr. 1987, pp. 850-858.

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