Electrostatically-controlled cantilever apparatus for continuous

Details Electrostatically-controlled cantilever apparatus for continuous Electrostatically-controlled cantilever apparatus for continuous

1995-10-13

1997-05-13

Bovernick, Rodney B.

Coherent light generators

Particular beam control device

Tuning

372 32, 372 96, H01S 310

Patent

active

056299516

ABSTRACT:
An electrostatically controlled cantilever apparatus for continuous tuning of the resonance wavelength of a Fabry-Perot cavity is disclosed. A resonant cavity is formed between two distributed Bragg reflector (DBR) mirrors. The top reflector is composed of a movable top DBR supported in a freely suspended cantilever, a variable-thickness air spacer layer and a fixed DBR. The bottom reflector is fixed on the substrate. By applying a tuning voltage to create electrostatic attraction, the cantilever may be deflected towards the substrate, thereby changing the thickness of the air spacer layer and consequently the resonant wavelength of the Fabry-Perot cavity.

REFERENCES:
patent: 5022745 (1991-06-01), Zayhowski et al.
patent: 5291502 (1994-03-01), Pezeshki et al.
Vail, E.C. et al., "GaAs micromachined widely tunable Fabry-Perot filters", Elect. Lett. 31(3), 2 Feb. 1995, pp. 228-229.
Wu, M.S. et al., "Tunable micromachined vertical cavity surface emitting laser", Elect. Lett., 31(19), 14 Sep. 1995, pp. 1671-1672.

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