Electrostatically-actuated structures for fluid property measure

Details Electrostatically-actuated structures for fluid property measure Electrostatically-actuated structures for fluid property measure

1998-01-13

1999-09-21

Williams, Hezron

Measuring and testing

Liquid analysis or analysis of the suspension of solids in a...

Viscosity

7386147, 73 2401, 73778, 361281, 3612834, 422 88, 340632, G01F 138, H01L 2984, G01N 2700, G01N 1100

Patent

active

059556595

ABSTRACT:
A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.

REFERENCES:
patent: 2536025 (1951-01-01), Blackburn
patent: 4361026 (1982-11-01), Muller et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4686847 (1987-08-01), Besocke
patent: 4706100 (1987-11-01), Tufte
patent: 4872335 (1989-10-01), Tsuroka et al.
patent: 4926682 (1990-05-01), Holm-Kennedy et al.
patent: 5131265 (1992-07-01), Tobin et al.
patent: 5189914 (1993-03-01), White et al.
patent: 5199298 (1993-04-01), Ng et al.
patent: 5377524 (1995-01-01), Wise et al.
patent: 5417235 (1995-05-01), Wise et al.
patent: 5445008 (1995-08-01), Wachter et al.
patent: 5453628 (1995-09-01), Hartsell et al.
patent: 5550516 (1996-08-01), Burns et al.
patent: 5682145 (1997-10-01), Sweetman et al.
patent: 5719324 (1998-02-01), Thundat et al.
M. Andrews et al., A Comparison Of Squeeze-Film Theory With Measurements On A Microstructure, Sensors and Actuators A, 36 (1993), pp. 79-87.
M. Andrews et al., A resonant pressure sensor based on a squeezed film of gas, Sensors and Actuators A, 36, pp. 219-226 (1993).
M. Andrews et al., A Wide Range Pressure Sensor Using the Squeeze Film Effect, The 7.sup.th International Conference on Solid-State Sensors and Actuators, pp. 214-216.
S.T. Cho et al., Secondary Sensitivities and Stabilities Of Ultrasensitive Silicon Pressure Sensors, Center for Integrated Sensors and Circuits, Solid-State Electronics Laboratory, 1990 IEEE, pp. 185-187.
Clark et al., Pressure Sensitivity in Anisotropically Etched Thin-Diaphragm Pressure Sensors, IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1887-1896.
Gupta et al., Pull-In Time Dynamics As A Mesure Of Absolute Pressure, Paper presented at the Tenth IEEE International Workshop on MEMS, Nogoya, JAPAN, Jan. 26-30, 1997, 1997 IEEE.
Gupta, et al., Pull-In Dynamics Of Electrostatiscally-Actuated Beams, Hilton Head 1996 Solid-State Sensor & Actuator Workshop Late News Paper, Jun. 2-6, 1996, pp. 1-2.
Gupta et al., Pull-In Dynamicas Of Electrostatiscally-Actuated Microstructures, SRC TECHCON 1996, Phoenix, Arizona, Sep. 12-14, 1996, pp. 1-4.
Bill Travis, Smart Sensors, EDN, May 9, 1996, A Cahners Publication, vol. 41, No. 10, pp. 57-65.
Milt Leonard, Micromachining Technologies Promise Smarter Sensors, Actuators For A Broad Range Of Applications, Electronic Design, Dec. 4, 1995, vol. 43, No. 25, pp. 35-42.
Cheryl Ajluni, Accelerometers: Not Just For Airbags Anymore, Electronic Design, Jun. 12, 1995, vol. 43, No. 12, pp. 93-106.

Affiliated with

Also associated with

Rating

Electrostatically-actuated structures for fluid property measure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatically-actuated structures for fluid property measure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatically-actuated structures for fluid property measure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-82152