Electrostatic vibration device

Details Electrostatic vibration device Electrostatic vibration device

2006-06-20

2006-06-20

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C331S154000

Reexamination Certificate

active

07062970

ABSTRACT:
A vibrator has a frame portion having a planar frame shape, an in-frame fixed portion which is fixed to a base portion and located in the inner space surrounded by the inner periphery of the frame portion, and a driving electrode comprising a first driving electrode disposed so as to confront the outer peripheral portion of the vibrator, and a second driving electrode which is equipped to the in-frame fixed portion so as to confront the inner peripheral portion of the frame portion, and the back-side portion of the in-frame fixed portion and the inner peripheral portion of the frame portion confronting the back-side portion are designed in an unevenly-shaped portion.

REFERENCES:
patent: 5780740 (1998-07-01), Lee et al.
patent: 5895852 (1999-04-01), Moriya et al.
patent: 6240780 (2001-06-01), Negoro et al.
patent: 6450033 (2002-09-01), Ito et al.
patent: 6494096 (2002-12-01), Sakai et al.
patent: 6507138 (2003-01-01), Rodgers et al.

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