Electrostatic ultrasonic transducer

Details Electrostatic ultrasonic transducer Electrostatic ultrasonic transducer

1994-10-21

1997-04-08

Tudor, Harold J.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

367153, 367174, 381113, 381116, 381174, 381191, B06B 102

Patent

active

056194765

ABSTRACT:
An electrostatic ultrasonic transducer formed on a semiconductor substrate by micro-machining wherein the transducer includes a silicon nitride membrane supported above the surface of the substrate by insulating supports; and the substrate and membrane define the electrodes of the transducer.

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