Electrostatic type micro transducer and control system using the

Details Electrostatic type micro transducer and control system using the Electrostatic type micro transducer and control system using the

1992-10-16

1994-11-22

Lateef, Marvin M.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

3612831, 3612833, H01G 700, H01G 1300, G01P 1508

Patent

active

053674294

ABSTRACT:
An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.

REFERENCES:
patent: 3772567 (1973-11-01), Leiber et al.
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patent: 4609968 (1986-09-01), Wilner
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4930042 (1990-05-01), Wiegand et al.
patent: 4999735 (1991-03-01), Wilner
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5243861 (1993-09-01), Kloeck et al.
Sensor Review entitled "Sensor technology: Japan update", Oct. 1988, pp. 207-209.
Electronic Design 45 entitled "Airbags Boom When IC Accelerometer Sees 50 G", Aug. 8, 1991.
Noritake Ura and Masayoshi Esashi, "Differential Capacitance Silicon Accelerometer" (Technical Digest of the 10th Sensor Symposium May 30-31, 1991, pp. 41-44).

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