Electrostatic silicon accelerometer

Details Electrostatic silicon accelerometer Electrostatic silicon accelerometer

1991-07-12

1992-05-19

James, Andrew J.

73517AV, 73517R, 357 74, 357 71, 357 49, G01P 1508, H01G 700

Patent

active

051152916

ABSTRACT:
A solid state accelerometer having an all silicon sensor for measuring accelerational and gravitational forces. The accelerometer measuring system also has associated electronics that include an analog rebalance loop and a digitizer loop.

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