Electrostatic removal of contaminants

Details Electrostatic removal of contaminants Electrostatic removal of contaminants

1987-06-11

1988-05-17

Pal, Asok

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

15 15R, 2091271, B08B 312

Patent

active

047448334

ABSTRACT:
An apparatus and method for electrostatic removal of micron and sub-micron sized contaminant particles is disclosed herein. The apparatus and method comprise creating a potential difference with a megavolt/cm electrostatic field between two conducting bases in a predetermined geometrical relation to each other. An insulator (e.g. a dielectric film) is maintained at or near contact between one of the bases and the surface to be cleaned to electrostatically remove particles from said surface. The bases can be made to move relative to each other and the surface to be cleaned.

REFERENCES:
patent: 2359476 (1944-10-01), Gravley
patent: 2920987 (1960-01-01), Landry et al.
patent: 3245835 (1966-04-01), Gallino
Young et al., IBM Technical Disclosure Bull., vol. 7(3) Aug. 1964, p. 181
Sachar, IBM Technical Disclosure Bull., vol. 18(5) Oct. 1975, pp. 1619-1621.

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