Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1993-12-10
1996-12-17
Czaja, Donald E.
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
15 151, 436177, 324459, 324464, A47L 1340
Patent
active
055849385
ABSTRACT:
An electrostatic decontamination method and decontamination device (10) is disclosed for decontaminating the surface of a semiconductor substrate. The decontamination device (10) includes particle ionizing device (24) that charges contaminating particles (26) on the surface of semiconductor substrate (16) thereby creating ionized particles. Decontamination device (10) also includes substrate biasing device (12) for creating a charge accumulation layer (14) at the top of semiconductor substrate (16) so that the charge accumulation layer (14) has the same charge sign as the ionized particles. In addition, the invention analytically characterizes particles using contaminating particle isolator (44) which contains a particle ionizing device (24) that charges contaminating particles (26) on the surface of semiconductor substrate (16) thereby creating ionized particles. Contaminating particle isolator (44) includes substrate biasing device (12) operable to create charge accumulation layer (14) at the top of semiconductor substrate (16) so that the charge accumulation layer (14) has the same charge sign as the ionized particles. Contaminating particle isolator (44) also includes particle collector (46) that collects the ionized particles. This permits characterizing the particles to determine their chemical composition.
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D. W. Cooper, H.L. Wolfe, and R. J. Miller, "Electrostatic Removal of Particles From Surfaces", Particles on Surfaces 1, book, edited by K. L. Mittal, Plenum Press, New York & London, 1988.
Dan A. Hays, "Electric Field Detachment of Charged Particles", Particles on Surfaces 1, book, edited by K. L. Mittal, Plenum Press, New York & London, 1988.
Robert Kaiser, "Enhanced Removal of Sub-Micron Particles From Surfaces By High Molecular Weight Fluorocarbon Surfactant Solutions", Particles on Surfaces 2, book, edited by K. L. Mittal, Plenum Press, New York & London, 1989.
Carlson Brian
Czaja Donald E.
Donaldson Richard
Stoltz Richard A.
Texas Instruments Incorporated
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