Electrostatic opposing field spectrometer for electron beam test

Details Electrostatic opposing field spectrometer for electron beam test Electrostatic opposing field spectrometer for electron beam test

1986-05-01

1988-05-31

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250310, H01J 4000

Patent

active

047483245

ABSTRACT:
A deflection element for an electrostatic opposing field spectrometer includes a grid electrode at a positive potential and a deflection electrode at a negative potential disposed symmetrically thereto, as well as housing portions disposed between the grid electrode and the deflection electrode, so that together they form a generated surface of a hollow cylinder disposed concentric to an optical axis of the spectrometer.

REFERENCES:
patent: 3731096 (1973-05-01), Carter
patent: 3783280 (1974-01-01), Watson
patent: 4464571 (1984-08-01), Plies
H. P. Feuerbaum, "VLSI Testing Using the Electron Probe", 1979/I Scanning Electron Microscopy, SEM Inc., AMF O'Hare, IL 60666, USA, 285-296.

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