Electrostatic multipole lens for charged-particle beam

Details Electrostatic multipole lens for charged-particle beam Electrostatic multipole lens for charged-particle beam

1990-11-21

1991-09-24

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250292, H01J 4942

Patent

active

050515934

ABSTRACT:
An electrostatic multipole lens consisting of flat electrodes, a pair of rod-like electrodes, and means for applying potentials to these electrodes. Each of the flat electrodes takes the form of a flat plate. The flat electrodes are disposed along an equipotential plane in an electrostatic n-pole field in or near planes given by y=.+-.(tan(.pi.
))x, the planes intersecting each other at the Z axis. The flat electrodes are cut out in the vicinity of the Z axis. The rod-like electrodes have surfaces which approximate in shape to a second equipotential plane in the n-pole field. The rod-like electrodes are located on the X axis in a region which contains the Z axis and is located between the planes. The potentials applied to these two kinds of electrodes correspond to the equipotential planes associated with the electrodes. Since the lens essentially consists only of the flat electrodes and the rod-like electrodes, the structure is simple. The dimension of the lens taken along the Y axis can be shortened.

REFERENCES:
patent: 3725700 (1973-04-01), Turner

Affiliated with

Also associated with

Rating

Electrostatic multipole lens for charged-particle beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic multipole lens for charged-particle beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic multipole lens for charged-particle beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1698446