Electrostatic movable micro mirror chip

Details Electrostatic movable micro mirror chip Electrostatic movable micro mirror chip

2005-09-27

2005-09-27

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100

Reexamination Certificate

active

06950224

ABSTRACT:
An electrostatic movable micro mirror chip includes an upper mirror plate and a lower electrode plate positioned and jointed together via pairs of fitting solder and positioning grooves. It improves the optical quality of the mirror chip by a lower joining temperature. The fitting and jointing achieves easy positioning and interconnection. The fabrication time and cost is less. The mirror in the mirror chip is plated with metallic coating on both sides so as to balance the stress and improve its flatness.

REFERENCES:
patent: 6075639 (2000-06-01), Kino et al.
patent: 6262827 (2001-07-01), Ueda et al.
patent: 6442307 (2002-08-01), Carr et al.
patent: 6795225 (2004-09-01), Tsuboi et al.
patent: 2001/0019445 (2001-09-01), Ueda
patent: 2002/0196523 (2002-12-01), Ueda
patent: 2003/0007262 (2003-01-01), Tsuboi et al.
patent: 2003/0035192 (2003-02-01), Mizuno et al.

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