Electrostatic microvalve and a method for the operation thereof

Details Electrostatic microvalve and a method for the operation thereof Electrostatic microvalve and a method for the operation thereof

2006-01-17

2006-01-17

Yu, Justine R. (Department: 3751)

Valves and valve actuation

Electrically actuated valve

C137S614110, C137S855000

Reexamination Certificate

active

06986500

ABSTRACT:
An electrostatic microvalve has a partition dividing a first and a second valve chamber from each other and having a through duct extending through it, such through duct opening at a first and a second opening into the first and the second valve chamber. In the first valve chamber there is a valve member for the control of first duct opening. In the second valve chamber there is a control member, using which the second duct opening may be at least partly closed in order to reduce the flow force acting on the valve member so that the valve member may be switched over with a smaller electrostatic force into a closed position closing the first duct opening

REFERENCES:
patent: 4585209 (1986-04-01), Aine et al.
patent: 5836750 (1998-11-01), Cabuz
patent: 6098661 (2000-08-01), Yim et al.
patent: 6215221 (2001-04-01), Cabuz et al.
patent: WO 00/28215 (2000-05-01), None
patent: WO 02/22492 (2002-03-01), None

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