Electrostatic microactuator

Details Electrostatic microactuator Electrostatic microactuator

1992-01-16

1993-05-25

Ullah, Akm E.

Optical waveguides

With optical coupler

Switch

310308, G02B 600, G02B 636

Patent

active

052147274

ABSTRACT:
An electrostatic microactuator for moving an optical fiber is described and includes an actuator plate with opposed major surfaces and interspersed conductive and nonconductive portions. The actuator plate is physically engaged with the optical fiber so that the fiber moves with the actuator. First and second segmented, conductive, torque stators are disposed adjacent the opposed major surfaces of the actuator plate. Multiphase circuitry is connected to segments of the torque stators for applying phased signals thereto to induce a linear actuating force in the actuator plate. The phased signals applied to the first and second torque stators are balanced so as to positionally balance the actuator plate during its travels.

REFERENCES:
patent: 4312561 (1982-01-01), Mead
patent: 4415229 (1983-11-01), McCullough
patent: 4445752 (1984-05-01), Faber et al.
patent: 4759597 (1988-07-01), Lemonde
patent: 4852962 (1989-08-01), Nicia
patent: 4922164 (1990-05-01), Jacobsen et al.
patent: 5090791 (1992-02-01), Kidder et al.
"The Principal of Electrostatic Linear Actuator Manufactured Silicon Micromachining", Proceedings of the 4th Conf. on Solid-State Sensors & Actuators, Tokyo, Japan, pp. 861-864.
"Microactuators for Aligning Optical Fibers", Sensors and Actuators, vol. 20, pp. 65-73, 1989, Jebens et al.
"Electrostatic Actuators for Micromechatronics", Fujita et al, IEEE Micro Robots and Teleoperators Workshop, 1987, IEEE Catalog No. 87TH0204-8.

Affiliated with

Also associated with

Rating

Electrostatic microactuator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic microactuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic microactuator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-904181