Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate
2005-04-07
2010-11-02
Enad, Elvin G (Department: 2832)
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Polarity-responsive
C200S181000
Reexamination Certificate
active
07825755
ABSTRACT:
A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.
REFERENCES:
patent: 6310339 (2001-10-01), Hsue et al.
patent: 6417807 (2002-07-01), Hsu et al.
patent: 6583374 (2003-06-01), Knieser et al.
patent: 2003/0162375 (2003-08-01), Chen et al.
patent: 2004/0061106 (2004-04-01), Kitagawa et al.
patent: 2001-102911 (2001-04-01), None
patent: 2002-305844 (2002-10-01), None
patent: 2003-513411 (2003-04-01), None
patent: 2004-103559 (2004-04-01), None
patent: 2004-530369 (2004-09-01), None
patent: 02/089251 (2002-11-01), None
Office Action issued Feb. 5, 2008 on the counterpart Japanese Patent Application No. 2004-316082 and the English Language Translation.
Yuko Yamauchi (et al.), The Institute of Electrical Engineers of Japan Micromachine Sensor System Kenkyukai, MSS-04, Nos. 16 to 34, May 12, 2004, pp. 101-105.
David T. Amm and Robert W. Crrigan, “Optical Performance of the Grating Light Valve Technology”, Photonics West-Electronic Imaging 1999.
E. Higurashi, R. Sawada, T.Ito, “Optically drivenangular alignment of microcomponents made of in-planebirefrigent polyimide film based on optical angular momentum transfer” J.OF Microeng. vol. 11(2), pp. 140-145, 2001.
S. Baglio, S. Castorina, L. Fortuna L.N. Savalli, “Modelingand design of novel photo-thermo-mechanical microactuators,” Sensors and Actuators A101(1-2), pp. 185-193, 2002.
International Search Report PCT/JP2005/006861 dated Apr. 28, 2005,(Japanes Patent Office).
E. Higurashi, R. Sawada, T.Ito, “Optically driven angular alignment of microcomponents made of in-plane birefringent polyimide film based on optical angular momentum transfer” J. of Microeng. vol. 11(2), pp. 140-145, 2001.
S. Baglio, S. Castorina, L. Fortuna, N. Savalli, “Modelingand design of novel photo-thermo-mechanical microactuators,” Sensors and Actuators A101(1-2), pp. 185-193, 2002.
Fujita Hiroyuki
Higo Akio
Kakushima Kuniyuki
Toshiyoshi Hiroshi
Yamauchi Yuko
Enad Elvin G
Ostrolenk Faber LLP
Rojas Bernard
The Foundation for the Promotion of Industrial Science
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