Electrostatic-magnetic lens arrangement

Details Electrostatic-magnetic lens arrangement Electrostatic-magnetic lens arrangement

1997-01-29

1998-07-14

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250310, H01J 4906

Patent

active

057808597

ABSTRACT:
An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens.

REFERENCES:
patent: 4785176 (1988-11-01), Frosien et al.
patent: 4823005 (1989-04-01), Garth

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