Electrostatic lens arrangement of multi-stages of multi-pole ele

Radiant energy – Ionic separation or analysis – Cyclically varying ion selecting field means

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250396R, H01J 4942

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active

052910164

ABSTRACT:
An electrostatic lens arrangement of three stages of quadrupole electrodes comprising first, second and third stage electrostatic lens unit connected in series, each electrostatic lens unit including first, second, third and fourth electrode arranged around a circle surrounding a center axis of an ion beam passage with an equal interval of 90.degree. C., wherein the respective first, second, third and fourth electrodes for the first, second and third stage electrostatic lens unit are respectively supported by first, second, third and fourth common supporting rod along respective straight lines while electrically insulating each other.

REFERENCES:
patent: 3376449 (1968-04-01), Harrison
patent: 3717785 (1973-02-01), Guerinet
patent: 4553029 (1985-11-01), Matsuda

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