Electrostatic dust collector for use in vacuum system

Details Electrostatic dust collector for use in vacuum system Electrostatic dust collector for use in vacuum system

1989-07-19

1990-07-17

Nozick, Bernard

Brushing, scrubbing, and general cleaning

Electrostatic cleaning

55150, 55149, 55155, B08B 600

Patent

active

049412248

ABSTRACT:
An electrostatic dust collector including a wall enclosing a vacuum chamber in which a target face to be subjected to dust removal is provided, an electron beam emitting device for emitting electron beams to dust on the target face so as to charge the dust negatively, a dielectric member which is provided in the vacuum chamber and has a collecting face confronting the target face and a member for imparting positive potential to the collecting face such that the dust charged negatively is attracted to the collecting face.

REFERENCES:
patent: 4071334 (1978-01-01), Kolb et al.
patent: 4744833 (1988-05-01), Cooper et al.
Sachar, K. S., Electrostatic Cleaning of Surfaces, IBM Technical Disclosure Bulletin, vol. 18, No. 5, Oct. 1975, pp. 1619-1621.

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