Electrostatic dispersion lenses and ion beam dispersion methods

Details Electrostatic dispersion lenses and ion beam dispersion methods Electrostatic dispersion lenses and ion beam dispersion methods

2007-05-29

2010-12-28

Kim, Robert (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S281000, C250S282000

Reexamination Certificate

active

07858950

ABSTRACT:
An EDL includes a case surface and at least one electrode surface. The EDL is configured to receive through the EDL a plurality of ion beams, to generate an electrostatic field between the one electrode surface and either the case surface or another electrode surface, and to increase the separation between the beams using the field. Other than an optional mid-plane intended to contain trajectories of the beams, the electrode surface or surfaces do not exhibit a plane of symmetry through which any beam received through the EDL must pass. In addition or in the alternative, the one electrode surface and either the case surface or the other electrode surface have geometries configured to shape the field to exhibit a less abrupt entrance and/or exit field transition in comparison to another electrostatic field shaped by two nested, one-quarter section, right cylindrical electrode surfaces with a constant gap width.

REFERENCES:
patent: 5220167 (1993-06-01), Brown et al.
patent: 6297501 (2001-10-01), Merren
patent: 2005/0189486 (2005-09-01), Fuhrer et al.
patent: 2005/0279933 (2005-12-01), Appelhans et al.

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