Electrostatic discharge protection of static sensitive devices c

Details Electrostatic discharge protection of static sensitive devices c Electrostatic discharge protection of static sensitive devices c

1996-10-04

1998-11-17

Alexander, Lyle A.

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 7, 134 72, 134902, 451 38, 451 39, 451 75, 451 78, 451102, B08B 600

Patent

active

058370641

ABSTRACT:
An apparatus and method that enhances removal of contaminating particles from surfaces of a static-sensitive components that are cleaned using a carbon dioxide cleaning spray produced by a jet spray gun. The apparatus has a programmable power supply that is connected to ground, to the static-sensitive component, and to the jet spray gun. The static-sensitive component is cleaned using the cleaning spray and the surface charge generated on the surface of the component or substrate is simultaneously monitored to determine the amount and polarity of the charge that is generated thereon. The programmable power supply then applies a reverse bias to the jet spray gun that is equal to and has the opposite polarity of the charge that is generated on the surface of the static-sensitive component or substrate, which neutralizes the charge generated on the surface of the component.

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