Electricity: electrical systems and devices – Safety and protection of systems and devices – Transient responsive
Reexamination Certificate
1999-12-30
2002-05-21
Sherry, Michael J. (Department: 2836)
Electricity: electrical systems and devices
Safety and protection of systems and devices
Transient responsive
C361S056000, C257S360000
Reexamination Certificate
active
06392860
ABSTRACT:
BACKGROUND OF THE INVENTION
1. The Field of the Invention
The present invention relates to an electrostatic discharge (ESD) protection circuit. More particularly, the present invention relates to an ESD protection circuit, which can improve the response speed by detecting an ESD signal with a circuit technique, and can maintain the deep current path by using a gate-modulated field-oxide device, so that this design can effectively improve ESD robustness.
2. Description of the Related Art
Electrostatic discharge (ESD) can easily damage IC devices such as DRAMs and SRAMs during both manufacture and operation. A person walking on a carpet, for instance, can carry up to several thousand volts of electrostatic charge under high relative humidity (RH) conditions and over 10,000 volts under low RH conditions. If such a person touches an IC package, the electrostatic charge on his/her body is instantly discharged to the IC package, thus causing ESD damage to the internal circuitry of the IC package. A widely used solution to this problem is to provide an on-chip ESD protection circuit around each I/O pad of the IC package.
One drawback to the prior art, however, is that when the IC device is fabricated by scaled down technology, such as the deep-submicron CMOS process, the gate-oxide structure is reduced in thickness. This causes the breakdown voltage of the gate-oxide structure to be close to or below the breakdown voltage at the source/drain junction, thus degrading the ESD protection capability. The internal circuitry of an IC device is typically drawn in accordance with the Minimum Design Rules. Therefore, the various semiconductor components of an IC device are designed to have the minimum size. This practice, however, makes some components vulnerable to ESD stress, when these components are further scaled down. For this reason, a highly-integrated IC device fabricated at the deep-submicron process is particularly vulnerable to ESD. Therefore, in the IC industry, much research effort has been directed to ESD protection for integrated circuitry.
FIG. 1A
is a circuit diagram for a conventional ESD protection circuit. As shown in
FIG. 1A
, in order to protect the internal circuit
10
, the ESD current imported through an input port INP is discharged through an NMOS transistor
12
to a ground V
SS
.
FIG. 1B
is a schematic circuit diagram of another conventional ESD protection circuit. As shown in
FIG. 1B
, in order to protect the internal circuit
18
, the ESD current can be discharged not only through an NMOS transistor
14
to the ground V
SS
but also through a PMOS transistor
16
to a voltage source V
dd
.
The conventional ESD protection circuits as described above and shown in
FIGS. 1A and 1B
both utilize junction breakdown voltage to protect an internal circuit from damage. However, when the IC device is fabricated at a scaled down CMOS process and the gate-oxide structure is accordingly reduced in thickness, some problems arise; for example, the breakdown voltage of the gate-oxide structure happens earlier than the junction breakdown voltage at the source/drain junction. In other words, if the breakdown voltage of the gate-oxide structure happens earlier than the junction breakdown voltage at the source/drain junction, then the conventional ESD protection circuits as shown in
FIGS. 1A and 1B
lose their protection ability.
FIG. 2
is a circuit diagram for another conventional ESD protection circuit. As shown in
FIG. 2
, the ESD protection circuit
20
comprises NMOS transistors
22
and
24
, a PMOS transistor
26
, a resistor (R)
28
and a capacitor (C)
30
. In NMOS transistor
22
, the drain is coupled to a voltage source V
dd
, the source is coupled to ground V
SS
, and the gate is coupled to a first node B. In NMOS transistor
24
, the drain is coupled to the first node B, the source is coupled to the ground V
SS
, and the gate is coupled to a second node A. In PMOS transistor
26
, the source is coupled to the voltage source V
dd
, the drain is coupled to the first node B, and the gate is coupled to the second node A. The resistor
28
is connected between the voltage source V
dd
and the second node A, while the capacitor
30
is connected between the second node A and the ground V
SS
.
The operation method for the conventional ESD protection circuit
20
as shown in
FIG. 2
is described as follows. For example, a situation of positive ESD stress is considered. When the positive ESD stress occurs, because of the resistor-capacitor delay (RC delay), i.e. the ESD stress on the voltage source V
dd
increases rapidly and is faster than the RC time constant, and the voltage on the node A increases very slowly corresponding to the voltage source V
dd
, the node A is not yet established in the positive potential. As a result, PMOS transistor
26
is turned on. Meanwhile the ESD current can be drained from PMOS transistor
26
to the gate of NMOS transistor
22
, so that NMOS transistor
22
can be turned on early and the ESD current is discharged through the NMOS transistor
22
to ground V
SS
. In spite of the protection of NMOS transistor
24
, such design requires a device with larger dimensions and size. In addition, the relative applications can refer to U.S. Pat. No. 5,744,842.
SUMMARY OF THE INVENTION
The invention provides an electrostatic discharge protection circuit. The electrostatic discharge protection circuit comprises a gate-modulated field-oxide device, an NMOS transistor, a PMOS transistor, a resistor and a capacitor. In the gate-modulated field-oxide device, the drain is coupled to a voltage source, the source is coupled to ground, and the gate is coupled to a first node. In the NMOS transistor, the drain is coupled to the first node, the source is coupled to the ground, and the gate is coupled to a second node. In the PMOS transistor, the source is coupled to the voltage source, the drain is coupled to the first node, and the gate is coupled to the second node. The resistor is connected between the voltage source and the second node and the capacitor is connected between the second node and the ground. Additionally, the gate of the gate-modulated field-oxide device is further connected to the substrate so as to raise the substrate voltage.
Additionally, the invention provides an electrostatic discharge protection circuit, which comprises a gate-modulated field-oxide device, an NMOS transistor, a PMOS transistor, a resistor and a capacitor. In the gate-modulated field-oxide device, the drain is coupled to a voltage source, the source and the gate are coupled to the ground, and the substrate is coupled to a first node. In the NMOS transistor, the drain is coupled to the first node, the source is coupled to the ground, and the gate is coupled to a second node. In the PMOS transistor, the source is coupled to the voltage source, the drain is coupled to the first node, and the gate is coupled to the second node. The resistor is connected between the voltage source and the second node and the capacitor is connected between the second node and the ground.
The gate-modulated field-oxide device according to the present invention is formed on a substrate and comprises: an isolation structure formed in the substrate, a gate electrode formed over the isolation structure and isolated from the substrate by a gate oxide layer, a drain region in the substrate at one side of the gate electrode, a source region in the substrate at the other side of the gate electrode, a deep N-well region in the bottom of the substrate and an n-well region which is formed in the substrate between the source region and the deep N-well region.
To achieve these and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, the invention provides an electrostatic discharge protection circuit, which forms a field-oxide region between the drain region and the source region. The surface channel between the drain region and the source region is broken because of the field-oxide region, so the whole ESD current is then discharged via th
Ker Ming-Dou
Lin Geeng-Lih
J. C. Patents
Sherry Michael J.
Vanguard International Semiconductor Corp.
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