Electrostatic discharge control during jet spray

Details Electrostatic discharge control during jet spray Electrostatic discharge control during jet spray

1992-09-28

1995-04-25

Rose, Robert A.

Abrading

Machine

Sandblast

451 78, 451 39, 451102, B24C 100

Patent

active

054094186

ABSTRACT:
An improved apparatus and method adapted for use in removing trace contaminants from the surface of a chosen substrate, such as delicate surfaces or precision parts, by application of a stream or jet spray of expanded fluid to the substrate surface. The improvement consists of controlling electrostatic charges generated on or near the substrate surface during the cleaning process.

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R. C. Loveridge, "C02 Jet Spray Cleaning of IR Thin Film Coated Optics," SPIE 36th International Symposium on Optical and Optoelectric Applied Science & Engineering, Jul. 21-26, 1991, San Diego, Calif.
S. A. Hoenig, "The Application of Dry Ice to the Removal of Particulates from Optical Apparatus, Spacecraft, Semiconductor Wafers, and Equipment Used in Contaminant Free Manufacturing Processes", Sep. 1985.
Patent Abstracts of Japan vol. 9, No. 115 (E-315) (Abstract) Jan. 1985.

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