Radiant energy – Electron energy analysis
Patent
1993-02-02
1994-10-18
Anderson, Bruce C.
Radiant energy
Electron energy analysis
H01J 4000, H01J 4700
Patent
active
053571070
ABSTRACT:
An electrostatic deflector for energy selection of a beam of charged particles has a plurality of main deflector plates arrayed in a generally cylindrical basic shape and to which electrostatic potentials are applied. The main deflector plates are shaped and the potentials are applied to generate a path of said beam from an input side of said deflector to an output side thereof by virtue of a deflecting field which is increasingly weakened to both sides of a central portion of the beam toward the main deflector plates relative to a field of ideal cylindrical shape, thereby causing second order angular aberration of the beam to substantially vanish. A pair of end deflector plates at opposite ends of the cylindrical basic shape have a repulsive potential with respect to the beam to effect focussing of the beam perpendicular to a dispersion plane of the deflector.
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Bruchmann Dieter
Ibach Harald
Lehwald Sieghart
Anderson Bruce C.
Dubno Herbert
Forschungszentrum Julich GmbH
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