Electrostatic deflecting electrode unit for use in charged beam

Details Electrostatic deflecting electrode unit for use in charged beam Electrostatic deflecting electrode unit for use in charged beam

1998-03-17

1999-07-27

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 37147

Patent

active

059294523

ABSTRACT:
A method of manufacturing an electrostatic deflecting electrode unit for use in charged beam lithography apparatus comprises a first step of preparing a hollow cylindrical member made of metal, a second step of forming grooves of a predetermined width in a cylindrical member in the direction of radius thereof and along lines that equally divides the periphery of the cylindrical member into eight sections, a third step of attaching a ring-like member made of an insulating material to each of end surfaces of the cylindrical member which are opposed to each other in the direction of axis of the cylindrical member in such a way that bottom portions of the grooves are exposed, and a fourth step of dividing the cylindrical member into eight electrodes by extending the bottom portions of the grooves in the direction of radius of the cylindrical member to reach the hole of the cylindrical member with the ring-like members attached. The dimensional precision of the electrostatic deflecting electrode is determined by the precision of the cylindrical member. Thus, the deflecting electrode unit is easy to process and assemble with precision.

REFERENCES:
patent: 5770862 (1998-06-01), Ooaeh et al.

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