Electrostatic control of micro-optical components

Details Electrostatic control of micro-optical components Electrostatic control of micro-optical components

2005-01-04

2005-01-04

Pham, Long (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Reexamination Certificate

active

06838738

ABSTRACT:
An electrostatic actuator with inter-digital rotor and stator fingers formed in a the insulating and conductive layers of a wafer. The actuator is used to drive MicroElectroMechanical (MEMS) components, specifically micro-optical components such as mirrors, attenuators, switches, and tunable filters.

REFERENCES:
patent: 5753911 (1998-05-01), Yasuda et al.
patent: 5969848 (1999-10-01), Lee et al.
patent: 6236096 (2001-05-01), Chang et al.
patent: 6428173 (2002-08-01), Dhuler et al.
patent: 6538284 (2003-03-01), Riccobene et al.
patent: 6539137 (2003-03-01), Moresco et al.

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