Electrostatic condenser type pressure sensor, and method for...

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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Reexamination Certificate

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07086287

ABSTRACT:
The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the pressure sensor. An annular spacer is mounted on the confronting faces of substrates around flat electrodes, and a frit is mounted around the spacer and is made of a material having a lower softening or melting point than that of the spacer.

REFERENCES:
patent: 4292659 (1981-09-01), Lao
patent: 5886249 (1999-03-01), Bonne et al.
patent: 6252759 (2001-06-01), Lange et al.
patent: 6324914 (2001-12-01), Xue et al.
patent: 6578427 (2003-06-01), Hegner
patent: 5-288623 (1993-11-01), None
patent: 8-240500 (1996-09-01), None
patent: 10-111206 (1998-04-01), None
Patent Abstracts of Japan, Publication No. 05-288623 dated Nov. 2, 1993 (2 pgs.).
Patent Abstracts of Japan, Publication No. 10-111206 dated Apr. 28, 1998 (2 pgs.).
Patent Abstracts of Japan, Publication No. 08-240500 dated Sep. 17, 1996 (2 pgs.).

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