Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2006-08-08
2006-08-08
Lefkowitz, Edward (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
Reexamination Certificate
active
07086287
ABSTRACT:
The present invention provides a small-sized electrostatic condenser type pressure sensor having high assembly accuracy but no dispersion in a detection accuracy, and a method for manufacturing the pressure sensor. An annular spacer is mounted on the confronting faces of substrates around flat electrodes, and a frit is mounted around the spacer and is made of a material having a lower softening or melting point than that of the spacer.
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Kuzuyama Daisuke
Morishita Sadaharu
Nozoe Satoshi
Toya Takashi
Yoshida Shinsuke
Allen Andre
Lefkowitz Edward
Omron Corporation
Osha & Liang LLP
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