Electrostatic clamp assembly for a lithographic apparatus

Details Electrostatic clamp assembly for a lithographic apparatus Electrostatic clamp assembly for a lithographic apparatus

2007-03-06

2007-03-06

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000, C355S077000

Reexamination Certificate

active

11099650

ABSTRACT:
An electrostatic clamp assembly for a lithographic apparatus is provided. The clamp assembly includes an electrostatic clamp structured to clamp an article against an article support structure during projection of a beam of radiation, and a controller structured to control at least one of the clamp and a backfill gas pressure to release the article from the article support structure by use of the backfill gas pressure.

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