Electrostatic chuck heater

Details Electrostatic chuck heater Electrostatic chuck heater

2011-08-30

2011-08-30

Pelham, Joseph M (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S390000, C118S728000

Reexamination Certificate

active

08008602

ABSTRACT:
An electrostatic chuck heater is provided including a base which is formed by applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode, calcining the alumina sintered body, arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode, and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set to not more than 0.25%.

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James Intrater, “The Challenge of Bonding Metals to Ceramics,” Machine Design, Penton, Media, Cleveland, OH, vol. 61, No. 24, Nov. 23, 1989, pp. 95-100.

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