Electrostatic chuck and manufacturing method for the same,...

Details Electrostatic chuck and manufacturing method for the same,... Electrostatic chuck and manufacturing method for the same,...

2004-12-23

2008-08-26

Zimmerman, John J. (Department: 1794)

Stock material or miscellaneous articles

Composite

Of inorganic material

C219S444100, C279S128000, C361S234000, C501S127000, C501S153000, C428S702000

Reexamination Certificate

active

07416793

ABSTRACT:
An electrostatic chuck comprises a dielectric ceramic layer made of an alumina sintered body having a volume resistivity equal to or greater than about 1×1017Ω·cm at room temperature and a volume resistivity equal to or greater than about 1×1014Ω·cm at 300° C., and an electrode formed on one surface of the dielectric ceramic layer.

REFERENCES:
patent: 3871891 (1975-03-01), Schuller et al.
patent: 2001/0043452 (2001-11-01), Divakar et al.
patent: 2003/0123213 (2003-07-01), Kosakai
patent: 03-204924 (1991-09-01), None
patent: 09-283607 (1997-10-01), None
patent: 2003-037158 (2003-02-01), None
patent: 2003-152065 (2003-05-01), None

Affiliated with

Also associated with

Rating

Electrostatic chuck and manufacturing method for the same,... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic chuck and manufacturing method for the same,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic chuck and manufacturing method for the same,... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4003348