Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

2009-03-19

2010-02-09

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

D0609655

CLAIM:
The ornamental design for an electrostatic chuck, as shown and described.

REFERENCES:
patent: 5998320 (1999-12-01), Yamada et al.
patent: 6370004 (2002-04-01), Yamaguchi
patent: D548705 (2007-08-01), Hayashi
patent: D552565 (2007-10-01), Nakamura et al.
patent: 7457098 (2008-11-01), Nakamura
patent: D587222 (2009-02-01), Sasaki et al.
patent: 2007/0146961 (2007-06-01), Morioka et al.
patent: 2007/0247779 (2007-10-01), Nakamura
patent: 2008/0037194 (2008-02-01), Kamitani et al.
patent: 2008/0144251 (2008-06-01), Tao et al.
patent: 403730 (2000-09-01), None
patent: 577861 (2004-03-01), None
patent: 286812 (2007-09-01), None

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