Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

2003-06-20

2004-05-18

Lieberman, Lucy (Department: 2913)

Machines not elsewhere specified

Material working, abrading, or founding machinery

Element or attachment

Design Patent

active

D0490096

CLAIM:
The ornamental design for a electrostatic chuck, as shown and described.

REFERENCES:
patent: 4518889 (1985-05-01), T Hoen
patent: 4692836 (1987-09-01), Suzuki
patent: 5474614 (1995-12-01), Robbins
patent: 5572398 (1996-11-01), Federlin et al.
patent: 5671116 (1997-09-01), Husain
patent: 5838528 (1998-11-01), Os et al.
patent: D420022 (2000-02-01), Burkhart et al.
patent: D425919 (2000-05-01), Burkhart et al.
patent: 6268994 (2001-07-01), Logan et al.
patent: 6513796 (2003-02-01), Leidy et al.
patent: 6639783 (2003-10-01), Shamouilian et al.

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