Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

2003-06-20

2004-05-11

Lieberman, Lucy (Department: 2913)

Machines not elsewhere specified

Material working, abrading, or founding machinery

Element or attachment

Design Patent

active

D0489740

CLAIM:
The ornamental design for a electrostatic chuck, as shown and described.

REFERENCES:
patent: 5535090 (1996-07-01), Sherman
patent: 5656093 (1997-08-01), Burkhart et al.
patent: 5825607 (1998-10-01), Burkhart
patent: 5838528 (1998-11-01), Os et al.
patent: D406852 (1999-03-01), Burkhart et al.
patent: D407073 (1999-03-01), Burkhart et al.
patent: D420022 (2000-02-01), Burkhart et al.
patent: D420023 (2000-02-01), Flanigan et al.
patent: D425919 (2000-05-01), Burkhart et al.
patent: 6081414 (2000-06-01), Flanigan et al.

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