Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

2008-07-22

2008-07-22

Chervinsky, Boris L (Department: 2835)

Electricity: electrical systems and devices

Housing or mounting assemblies with diverse electrical...

For electronic systems and devices

C361S234000, C361S690000

Reexamination Certificate

active

07403386

ABSTRACT:
An electrostatic chuck includes; a base made of ceramics, in which an electrode generating electrostatic attractive force is embedded; a cooling member which contains metal; a bonding material which bonds the base and the cooling member to each other; a gas providing passage which penetrates the base, the bonding material, and the cooling member; and an engagement member and a bolt member, which are fixing members mechanically fixing the base and the cooling member to each other.

REFERENCES:
patent: 6125025 (2000-09-01), Howald et al.
patent: 6179921 (2001-01-01), Ruffell et al.
patent: 6223447 (2001-05-01), Yudovsky et al.
patent: 6292346 (2001-09-01), Ohno et al.
patent: 6490146 (2002-12-01), Wang et al.
patent: 6494955 (2002-12-01), Lei et al.
patent: 6538872 (2003-03-01), Wang et al.
patent: 6549393 (2003-04-01), Kanno et al.
patent: 7004180 (2006-02-01), Akiba
patent: 7102872 (2006-09-01), Cho et al.
patent: 7209339 (2007-04-01), Kitabayashi et al.
patent: 2003/0107866 (2003-06-01), Lee et al.
patent: 2004/0085706 (2004-05-01), Tomoyoshi
patent: 2002-093894 (2002-03-01), None

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