Electrostatic charged-particle analyzer

Details Electrostatic charged-particle analyzer Electrostatic charged-particle analyzer

1977-01-26

1978-11-21

Dixon, Harold A.

Radiant energy

Electron energy analysis

250310, G01M 2300, H01J 3900

Patent

active

041267826

ABSTRACT:
An electrostatic charged-particle analyzer includes a deflecting electrode system which focuses charged particles emitted from a sample by irradiating the sample with a primary beam, the particles being focused on the axis of the primary beam or on an identical circumference about the axis, and a cylindrical mirror type analyzer whose object point is the focusing point, whereby the accepted solid angle for the charged particles is made large.

REFERENCES:
patent: 3783280 (1974-01-01), Watson
patent: 3787692 (1974-01-01), Anderson
patent: 3805057 (1974-04-01), Yanagisawa et al.

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