Electrostatic charge measurement method, focus adjustment...

Details Electrostatic charge measurement method, focus adjustment... Electrostatic charge measurement method, focus adjustment...

2008-02-27

2010-06-29

Souw, Bernard E (Department: 2881)

Radiant energy

Electron energy analysis

C250S310000, C250S311000, C850S010000, C850S011000, C850S062000

Reexamination Certificate

active

07745782

ABSTRACT:
A method and a device are disclosed for suppressing error in electrostatic charge amount or defocus on the basis of electrostatic charge storage due to electron beam scanning when measuring the electrostatic charge amount of the sample or a focus adjustment amount by scanning the electron beam. An electrostatic charge measurement method, a focus adjustment method, or a scanning electron microscope for measuring an electrostatic charge amount or controlling an application voltage to the sample changes the application voltage to the energy filter while moving the scanning location of the electron beam on the sample.

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