Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1996-07-15
1997-10-07
Dougherty, Elizabeth L.
Measuring and testing
Fluid pressure gauge
Diaphragm
73724, 3612834, G01L 912
Patent
active
056750862
ABSTRACT:
An electrostatic capacity-type pressure sensor includes a diaphragm support body, first and second lids, a fixed electrode, a coupling member, an electrode support member, and a movable electrode. The diaphragm support body is formed into a tube shape. The first and second lids have thin diaphragm portions and thick fixing portions formed integrally with peripheral edge portions of the diaphragm portions and are arranged to face each other by bringing the fixing portions in tight contact with the two end portions of the diaphragm support body. The first and second lids separate the interior of the diaphragm support body from the outside by closing the two end portions of the diaphragm support body. The fixed electrode is formed on the inner surface of the fixing portion of at least one of the first and second lids. The coupling member has two ends respectively connected to the first and second lids to couple the diaphragm portions facing each other. The electrode support member is supported by the coupling member and arranged between the first and second lids at a predetermined interval. The movable electrode is formed on the electrode support member so as to face the fixed electrode. The movable electrode and the fixed electrodes are arranged parallel to each other at a predetermined interval to constitute a capacitor.
REFERENCES:
patent: 3479879 (1969-11-01), Music
patent: 4120206 (1978-10-01), Rud, Jr.
patent: 4388833 (1983-06-01), Kuwayama
patent: 4445383 (1984-05-01), Binder et al.
patent: 4507972 (1985-04-01), Morita
patent: 4523474 (1985-06-01), Browne et al.
patent: 4735098 (1988-04-01), Kavli et al.
patent: 4873870 (1989-10-01), Delatorre
patent: 5006952 (1991-04-01), Thomas
patent: 5056369 (1991-10-01), Tamai et al.
patent: 5209121 (1993-05-01), Hafner
patent: 5259247 (1993-11-01), Bantien
patent: 5412992 (1995-05-01), Tobita et al.
patent: 5471884 (1995-12-01), Czarnocki et al.
patent: 5485345 (1996-01-01), Lukasiewicz et al.
patent: 5507186 (1996-04-01), Weiblen et al.
patent: 5522267 (1996-06-01), Lewis et al.
Goshoo Yasuhiro
Ishikura Yoshiyuki
Kihara Takashi
Kimura Shigeo
Amrozowicz Paul D.
Dougherty Elizabeth L.
Yamatake-Honeywell Co. Ltd.
LandOfFree
Electrostatic capacity-type pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electrostatic capacity-type pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic capacity-type pressure sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2359033