Electrostatic capacity type pressure detector

Details Electrostatic capacity type pressure detector Electrostatic capacity type pressure detector

1988-08-01

1990-02-27

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 361383, G01L 708, G01L 912

Patent

active

049035320

ABSTRACT:
An electrostatic capacity type pressure detector having a central diaphragm, which is deformed by pressure, and a fixed electrode on each side of the diaphragm. Each of the fixed electrodes includes a first electrically conductive plate confronting the diaphragm, an insulating plate joined to the first conductive plate, and a second electrically conductive plate joined to the first plate. An annular support joined to the diaphragm and to the insulating plate surrounds but is insulated from the first electrically conductive plate. A hole in the electrode introdues pressure into a space defined by the electrode and the diaphragm.

REFERENCES:
patent: 4196632 (1989-04-01), Sikorra
patent: 4445383 (1984-05-01), Binder et al.
patent: 4542435 (1985-09-01), Freud et al.
patent: 4581676 (1986-04-01), Baxter et al.

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