Electrostatic capacity type differential pressure detector

Details Electrostatic capacity type differential pressure detector Electrostatic capacity type differential pressure detector

1992-07-23

1994-09-06

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 361281, G01L 912

Patent

active

053437560

ABSTRACT:
An electrostatic capacity type differential pressure detector wherein capacitances are formed between a diaphragm as a movable electrode which is subjected to displacement depending on a differential pressure and fixed electrodes which are arranged on opposite sides of the diaphragm. Each of the fixed electrodes has a first electrically conductive plate closely adjoining and confronting a surface of a central portion of the diaphragm. An annular support is joined to the surface of a circumferential edge portion of the diaphragm and is spaced from and surrounds the outer circumferential surface of the first electrically conductive plate. A solid insulator completely fills an annular space between the first electrically conductive plate and the annular support and is spaced from the diaphragm. An insulating plate is commonly joined to each surface of the annular support and the first electrically conductive plate on the side of the annular support and conductive plate opposite the diaphragm; and a second electrically conductive plate is joined to the surface of the insulating plate opposite the diaphragm and is electrically connected with the first electrically conductive plate. There is a pressure introducing hole extending through the first and second electrically conductive plates and through the insulating plate. Both the first electrically conductive plate and the annular support are composed of silicon, the insulator being composed of a glass material which has a thermal expansion coefficient substantially that of silicon.

REFERENCES:
patent: 4735098 (1988-04-01), Kavli et al.
patent: 4903532 (1990-02-01), Tamai et al.
patent: 5056369 (1991-10-01), Tamai et al.

Affiliated with

Also associated with

Rating

Electrostatic capacity type differential pressure detector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Electrostatic capacity type differential pressure detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic capacity type differential pressure detector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1322384