Electrostatic-capacity-type acceleration sensor and...

Details Electrostatic-capacity-type acceleration sensor and... Electrostatic-capacity-type acceleration sensor and...

2006-02-28

2006-02-28

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C361S283100

Reexamination Certificate

active

07004027

ABSTRACT:
A moving member having a plurality of moving electrodes is supported by support members at both ends thereof on a substrate surface in such a way that it can be subjected to displacement in a two-dimensional plane. A plurality of fixed electrodes are arranged to face the plurality of moving electrodes respectively, thus forming different facing areas therebetween when an input acceleration is zero. The facing areas formed between pairs of the electrodes facing each other are varied in response to the displacement of the moving member, whereby a capacitance caused by one pair of the electrodes whose facing area is relatively small is used to detect a relatively small input acceleration, and a capacitance caused by the other pair of the electrodes whose facing area is relatively large is used to detect a relatively large input acceleration.

REFERENCES:
patent: 5631422 (1997-05-01), Sulzberger et al.
patent: 6041653 (2000-03-01), Ichikawa et al.
patent: 6792805 (2004-09-01), Murata et al.
patent: 0 303 284 (1989-02-01), None
patent: 07-260510 (1995-10-01), None
patent: 10-206457 (1998-08-01), None

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