Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1997-02-26
1999-01-26
Williams, Hezron
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
G01P 15125
Patent
active
058640630
ABSTRACT:
An enplane displacement, electrostatic capacity-type acceleration sensor includes a sensor unit made from a silicon substrate having a displaceable electrode and a fixed electrode, a pair of protective substrates bonded on opposing sides of the sensor unit, and an integrated circuit for detecting acceleration from the electrostatic capacity of the sensor unit. Sensor unit connection electrodes formed for connecting the sensor unit with the integrated circuit are disposed on the side of the sensor unit facing one of the protective substrates. Electrode holes are disposed in one protective substrate which are formed as through-holes in the substrate at positions corresponding to the connection electrodes. The integrated circuit is connected to the protective substrate in which the electrode holes are formed with the connections of the integrated circuit inserted through the electrode holes and electrically connected with the connection electrodes of the sensor unit.
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Otani Hiroshi
Yamaguchi Yasuo
Mitsubishi Denki & Kabushiki Kaisha
Moller Richard A.
Williams Hezron
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