Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Responsive to non-optical – non-electrical signal
Patent
1997-07-02
2000-04-18
Chang, Joni
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Responsive to non-optical, non-electrical signal
257417, H01L 2720
Patent
active
060518553
ABSTRACT:
A miniature electrostatic capacitive sensor in which electrical insulation is reliably established between a CV conversion circuit and a sensing unit. Also disclosed is a manufacturing method for the above type of capacitive sensor. The capacitive sensor is constructed of a sensing unit having a movable electrode and a stationary electrode, and a CV-conversion-circuit-forming portion having a CV conversion circuit. The movable electrode is constructed of a first support portion, a leaf spring connected to the first support portion, and a mass portion movably supported by the leaf spring. The stationary electrode is formed of a second support portion and a projecting portion connected to the second support portion. The CV-conversion-circuit forming portion and the first and second support portion are made thin. Accordingly, a shallow clearance is formed between the CV-conversion-circuit forming portion and each of the first support portion and the stationary electrode. An insulating substance can thus be positively deposited in the clearance, thereby forming an electrically insulating portion between the CV conversion circuit and the sensing unit.
REFERENCES:
patent: 5072277 (1991-12-01), Sakakibara et al.
patent: 5250836 (1993-10-01), Miura et al.
patent: 5576250 (1996-11-01), Diem et al.
patent: 5627317 (1997-05-01), Offenberg et al.
patent: 5880921 (1999-03-01), Tham et al.
Kobayashi Shinji
Yaji Kaneo
Chang Joni
Murata Manufacturing Co. Ltd.
LandOfFree
Electrostatic capacitive sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Electrostatic capacitive sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Electrostatic capacitive sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2338013