Electrostatic capacitive pressure sensor

Details Electrostatic capacitive pressure sensor Electrostatic capacitive pressure sensor

1987-12-01

1988-09-06

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 516, G01L 912

Patent

active

047697385

ABSTRACT:
An electrostatic capacitive pressure sensor having two silicon diaphragms electrostatically bonded to opposite faces of an insulating member to form two measuring chambers. A silicon base is coupled to the first diaphragm to form a pressure chamber. The insulating member is provided with a through-hole electrode. The electrode and the two silicon diaphragms are operative to measure pressure in the pressure chamber by measuring changes in capacity in the measuring chambers.

REFERENCES:
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4467394 (1984-08-01), Grantham et al.
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4628403 (1986-12-01), Kuisma

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